Лазерный измерительный микроскоп OLS4100
The LEXT OLS4100 is a Laser Scanning Microscope to perform non-contact 3D observations and measurements of surface features at 10 nanometer resolutions. It also features a fast image acquisition and a high-resolution image over a wider area.
Wider Sample Range
Imaging Slopes up to 85°
Micro-Profile Measurements with 10 nm Height Resolution
STEP Height standard Type B, PTB-5, Institut für Mikroelektronik, Germany, 6 nm Detection in Height Measurement
With the OLS4100, an impressive X-Y resolution of 0.12 microns is now possible thanks to a short-wavelength 405 nm laser and a high aperture objective lens. As a result, the OLS4100 can perform submicron measurements of a sample's surface. With a precise 0.8 nanometerresolution linear scale and software algorithms such as our original I-Z curve, the OLS4100 can resolve height differences of 10 nanometers.
Overcoming Reflectance Differences
Diamond Electroplated Tool
Objective Lens: MPlanApoN50xLEXT
The OLS4100 employs a dual confocal system, incorporating two confocal optical light paths. In combination with a highsensitivity detector, this enables the OLS4100 to capture a precise 3D image from a sample consisting of materials with different reflectance characteristics.
Applicable to Transparent Layers
The LEXT OLS4100's new multilayer mode is capable of recognizing the peaks of reflected light intensities originating from multiple layers. Setting each layer as the focal point makes it possible to observe and measure the upper surface of a transparent sample. This also enables the analysis of multiple layers, measuring the thickness of each layer.
Observation/Measurement of Multiple Layers of Transparent Material
The multi-layer mode facilitates observation and measurement of the transparent layer on the surface of a transparent sample. Even with a transparent resin layer on a glass substrate, the shape and roughness of each layer as well as the thickness of the surface film can be measured.
Industry's First* Double Performance Guarantee
Accuracy and Repeatability
The performance of a measuring tool is typically expressed using two different terms: "accuracy," which indicates how close a measurement value is to its true value, and "repeatability," which indicates the degree of variations among repeated measurement values. The OLS4100 is the industry's first* LSM able to assure both accuracy and repeatability.
The OLS4100 uses a rigorous system of production for every component. From the objective lens to the laser head, Olympus delivers only the highest-quality systems based on comprehensive inspection to the strictest standards. On delivery, final adjustment and calibration is performed by qualified engineers in the actual measurement environment.
Wide Range of Measurement Types
This mode allows measurement of a step between any two arbitrary points on a surface profile. Profile Measurement is also available.
Surface Roughness Measurement
This mode allows measurement of line roughness on one line and plane roughness on the entire surface.
With a user-defined threshold level on a surface profile, this mode allows measurement of the volume (or area) of a geometry above or below the threshold level.
Particle Measurement (optional)
This mode enables auto-separation of particles with the separator function, setting of a threshold level, and setting of a detection range within a region of interest.
This mode allows measurement of the distance between two arbitrary points on a geometric image. The geometric shape and angle for circle, rectangle, etc. are measured.
Film Thickness Measurement (optional)
This mode allows the thickness of a film on a transparent body to be measured by detecting changes in refractive index.
Auto Edge Detection/ Measurement (optional)
This mode allows a line width or a diameter to be measured by automatically detecting edges in a geometric image. This reduces uncertainty by eliminating operator error.
OLYMPUS Stream (optional)
Workflow Solution for Improved Image Analysis Performance
For grain size analysis or nonmetallic inclusion rating, optional OLYMPUS Stream microimaging software is available, which can be uploaded directly from the OLS4100.
Learn more about the OLYMPUS Stream >
Improved Roughness Measurement
LEXT OLS 4100 Parameters
The LEXT OLS4100 has been developed to represent a new standard of surface roughness measuring. The OLS4100 is calibrated in the same way as contact surface roughness gauges and has the necessary roughness parameters and filters required per ISO and JQA. This allows users with contact surface roughness gauges to obtain output results from the system consistent with their existing instruments, with the advantage of greater speed and non-contact measurement. The OLS4100 has a roughness-specific mode enabling roughness profile measurement for sample lengths up to 100mm with an automatic line stitching function. The OLS4100 comes with the same Surface Profile Parameters as contact-type surface roughness gauges, offering compatible operability and measurement results.
Pp, Pv, Pz, Pc, Pt, Pa, Pq, Psk, Pku, Psm, PΔq, Pmr(c), Pδc, Pmr
Rp, Rv, Rz, Rc, Rt, Ra, Rq, Rsk, Rku, Rsm, RΔq, Rmr(c),Rδc, Rmr, RZJIS, Ra75
Wp, Wv, Wz, Wc, Wt, Wa, Wq, Wsk, Wku, Wsm, WΔq, Wmr(c), Wδc, Wmr
Bearing Area Curve
Rk, Rpk, Rvk, Mr1, Mr2
R, Rx, AR, W, Wx, AW, Wte
Roughness Profile (JIS 1994)
Ra(JIS1994), Ry, Rz(JIS1994), Sm, S, tp
R3z, P3z, PeakCount
Accommodating Next-Generation Parameters
The OLS4100 comes with roughness (3D) parameters conforming to ISO25178 for reliable evaluation of the planar area.
Sq, Ssk, Sku, Sp, Sv, Sz, Sa
Smr(c), Sdc(mr), Sk, Spk, Svk, SMr1, SMr2, Sxp
Vv(p), Vvv, Vvc, Vm(p), Vmp, Vmc
LEXT OLS4100 performance is comparable with results of a sur face roughness gauge.
Contact surface roughness gauges cannot measure micro surface contours less than the stylus tip diameter. The OLS4100 can measure the surface roughness of micro geometries at high resolution due to a minute laser spot diameter.
Since a contact surface roughness gauge uses a hard needle-shaped stylus, it is more likely to scratch the surface of a soft specimen, damaging or deforming it. With adhesive specimens, on the other hand, the stylus can attach to the specimen and be damaged when pulled loose, making it impossible to obtain correct results. The OLS4100, a noncontact laser microscope, can perform accurate surface roughness measurement regardless of surface texture conditions.
Polymer Film 3D image
Measurement of Features at the Micron Level
Surface roughness gauges cannot measure micron-level features since their styli are not able to access these areas. The OLS4100 can correctly identify a measuring position and easily perform roughness measurement of a target micro area.
Crystal-Clear 3D Color Images
Three Types of Integrated Images
Natural Color Reproduction
The OLS4100 uses a white LED light and a high-color-fidelity CCD camera to generate clear, natural-looking color images, comparable to those obtained with high-grade optical microscopes.
2D Color Image (Inkjet Dots on Paper, Objective Lens 20x)
3D Color Image (Inkjet Dots on Paper, Objective Lens 20x)
Realistic Surface Reproduction, Laser DIC (Differential Interference Contrast)
Differential Interference Contrast (DIC) is an observation method used to visualize nanometer micro surface contours, which normally lie far beyond the resolving power of a laser microscope. Thanks to its DIC laser mode, the LEXT OLS4100 allows you to obtain live images comparable to those of an electron microscope under relatively low power magnifications.
Optimized Balance Between Brightness and Contrast, HDR (High Dynamic Range) Imaging
The OLS4100's High Dynamic Range (HDR) function combines several optical microscope images captured using different exposures. Brightness, contrast, texture, and saturation are controlled individually so that HDR creates images with a wide dynamic range. This enables clear visualization of a color image, especially for samples lacking texture.
Color Image without HDR
(Super-Density Fabric, Objective Lens 20x, Zoom 1x)
Color Image with HDR
(Super-Density Fabric, Objective Lens 20x, Zoom 1x)
Stabilization of Measurement and Imaging Environments
Hybrid Vibration-Dampening Mechanism
To eliminate external influences on measurement and imaging, the OLS4100 incorporates a hybrid vibrationdampening mechanism using coil springs and dampening rubber to stabilize the operating environment. This eliminates the need for a dedicated vibration-dampening stand, allowing measurements on any desktop.
Systematic Workflow via Intuitive GUI
Easy Three-Step Process
With the LEXT OLS4100, observation or measurement begins immediately once the sample is placed on the stage. Thanks to our easy three-step “Imaging, Measurement and Reports” process, measurement procedures can be quickly mastered, even by those not familiar with laser microscopy.
Keeping Track of the Sample
Macro Map Functionality
The OLS4100’s macro map function allows wide-field image display of a sample under low magnification, with a rectangular observation marker on the macro sample image. The field of view can be set up to 21 times wider than the conventional view. When used together with the motorized six-lens nosepiece, the macro map function allows smooth, convenient, one-click operation for stage movement and magnification. Accurate parfocality and objective lens centering can be preset and synchronized with one-click stage movement and magnification.
Fast Macro Map Stitching
Two stitching methods are available for scanning large areas: Manual mode for live image acquisition and Automatic mode for faster image acquisition. Operation is quick and simple—2D stitching starts automatically at the touch of a single button, and wide area images are acquired immediately. The stitching size is available from five steps in 3x3, 5x5, 7x7, 9x9, and 21x21 in Automatic mode. Unnecessary parts of the acquired images can also be removed manually with simple mouse/joystick operation.
Smart Scan for Simple 3D Imaging
Automatic 3D Image Acquisition
Conventional 3D scanning requires complicated settings that are difficult for novice users. With the LEXT OLS4100’s new Smart Scan mode, even first-time users can quickly acquire 3D images with a single click of a button. In addition to upper and lower limit settings, appropriate brightness level is automatically set up by the system based on the image to be captured, allowing even new users to obtain accurate height measurements and an optimized image.
Automatic Brightness Control
Brightness Control on a Plane
Brightness Control with a Range of Height.
Greater Reduction of Acquisition Time
Improved Scanning Speed
The new Ultra-Fast mode allows scanned image acquisition at twice the speed of conventional Fast mode, and approximately nine times the speed of Fine mode. This makes it possible to measure micro-samples with very steep angles, such as the tip of a knife, which is difficult to observe due to fine Z-step movement and high magnification.
Number of images acquired in a set amount of elapsed time:
Actual scanning time varies depending on magnification in use and Z-acquisition range.
High-Speed Acquisition of Required Areas Only
The OLS4100 also comes with a Band Scan mode for measurement of limited target areas, providing measurement performance 1/8th faster than conventional modes.
Acquisition with a Full Scan
Acquisition with Band Scan (1/8th )
New High-Speed Stitching Mode
Specify Target Areas from Wider-Area Stitched Images
As in macro mapping, the area to be observed can be specified from a wide area map. In Automatic mode, an area map can be automatically generated in roughly half the time it normally takes by setting a rectangular stitching size of up to 625 images. Observation can begin immediately once the target area is specified on the area map.
Stitching Area: Square (21x3) 63 Pieces
Stitching Area: Circle (3 Points)
Manually Specifying Required Image Areas
In Live mode, the area to be observed can be selected manually by tracing the required region onscreen. This is ideal when the sample has an irregular shape.
Quick Image Acquisition
In Smart Scan mode, all it takes is the click of a button. As the location across the Z-axis is automatically adjusted, image acquisition in the Z-axis direction can be restricted to required areas only, for rapid high-power observation across a wide area.
Smart Scan Mode
Conventional Acquisition Mode
Customizable Reports at the Touch of a Button
The OLS4100 generates reports at the touch of a button after measurement, and an edit function allows the operator to customize each report template. Copying and pasting measured results into a word processing/spreadsheet application is also quite simple, as is retrieving required images/reports from a database.
A detailed user-designed wizard function eliminates the need for lengthy training and allows quick and easy operation by new operators.